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Glove box 4 (Thermal evaporator)

equipment explanation
Model customized
Operating time SUN(00:00~24:00)
MON(00:00~24:00)
TUE(00:00~24:00)
WED(00:00~24:00)
THU(00:00~24:00)
FRI(00:00~24:00)
SAT(00:00~24:00)
Location 86291
inquiry Debottam Daw
010-2376-9558
Reservation

System descriptions

- Evaporation of metal (Au) can be done in the chamber. Only thermal evaporator exists in the main chamber (No ebeam evaporation system)


System specifications

- O2 content : Less than 1 ppm

H2O content : Less than 1 ppm

Atmospheric gas : Ar (5N)

Evaporator - Thermal evaporation of Au, Thickness monitor can detcet the metal thickness in the order of 0.1 nm

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