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Dry transfer system (Hot temp. probe sys.)

equipment explanation
Model HOT-TEMP PROBE-SYSTEM
Operating time SUN(00:00~24:00)
MON(00:00~24:00)
TUE(00:00~24:00)
WED(00:00~24:00)
THU(00:00~24:00)
FRI(00:00~24:00)
SAT(00:00~24:00)
Location 86691
inquiry Debottam Daw
010-2376-9558
Reservation

Align transfer system for various 2D material / device fabrication

 

 

 

1.Probe station main body unit

-Ambient coaxial chuck

-Vacuum chuck : center hold, on&off switch

-Z stage : fine motion, up&down : 10[mm ]

-Theta Micro control 15c

-X,Y stage : travel 200x200[mm], fine motion

2. CCD camera precision system

3.Hot chuck & controller spot : 100[mm]

-Temp range : Max 250 [degree]

-Temp resolution : 1[degree]

5. Vacuum pump : low noise for lab

6. PSM 100 High magnification microscope 

LIST