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[83179호]잔류가스분석기/Residual Gas Analyzer

equipment explanation
Model RGA100/123
Operating time 01:00 ~ 24:00
inquiry 박상우
Reservation

Mass Range: 1 to 100 amu

Mass filter type : Quadrupole
(Cylindrical rods, rod diameter: 0.25\", rod length: 4.5\")

Resolution
(per AVS standard 2.3).
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass range.

Sensitivity (A/Torr)* 2.10-4 (FC)<200 (CDEM)

Minimum detectable partial pressure (MDPP)*
5.10-11 Torr (FC).
5.10-14 Torr (CDEM)

Operating pressure range
10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM)
Max. bakeout temperature (without ECU)
300°C

Operating Temperature 70°C (max.)

 

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